Research Programs

National Nanotechnology Infrastructure Network
National Nanotechnology Infrastructure Network The Georgia Tech-NNIN (GIT-NNIN) site emphasizes the application of nanofabrication to bioengineering and biomedicine. Much of the GIT-NNIN activity is carried out in the Nanotechnology Research Center (NRC). The NRC is housed in two buildings: the Pettit Microelectronics building that includes an 8,500 sq. ft. cleanroom (75% class 100, 25% class 10) and the Marcus Nanotechnology Building with its 10,000 sq. ft. inorganic cleanroom (class 10-1000) and 5,000 sq. ft. organic cleanroom (class 1000-10,000). The major fabrication facilities in the cleanroom include thin film deposition, plasma processing, optical and electron beam lithography (100 keV / 4nm spot size JEOL JBX 9300FS), thermal processing, electroplating, wafer lapping, polishing, dicing, bonding and sawing, wire bonding, flip chip bonding, III-V MBE growth, and a 2-metal/2-poly CMOS and MEMS line (ion implantation outsourced).
Interconnect Focus Center
Interconnect Focus Center The Interconnect Focus Center (IFC) conducts research to discover and invent new electrical, optical and thermal interconnect solutions that will meet or exceed ITRS projections and enable hyper-integration of heterogeneous components for future terascale systems.
Nanolithography
nanolithography Georgia Tech's Nanotechnology Research Center (NRC) currently operates a JEOL JBX-9300FS 100kV electron beam lithography system. Active research projects utilizing the tool include such topics as advanced high resolution chemically amplified resists, quantum dot fabrication, t-gate patterning for high speed HEMT devices, high resolution nano-imprint embossing stamps, and high speed photo detectors.
Materials Research Science and Engineering Center
CMOS as a Research Platform The Georgia Tech MRSEC is an interdisciplinary team of university, industrial and national laboratory scientists and engineers working together to address the need for new electronic materials and associated processes for applications in microelectronics, optics and sensors. This program includes a single Interdisciplinary Research Group (IRG) on Graphene Science and Technology. Its focus is to investigate fabrication and characterization approaches for the implementation of epitaxial graphene as an electronic material.

 

RESEARCH AT THE NRC 

 
As the premier nanotechnology research facility in the region, the NRC serves nearly 600 users per year enabling interdisciplinary research in nanoscience, nanoengineering, microelectronics, integrated optoelectronics, MEMS, and BioMEMs.